Fabrication of an Electrochemical Tip-Probe System Embedded in SiNx-Cantilevers for Simultaneous SECM and AFM Analysis

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5342, Issue , 2004, Pages 53-64

  Fasching, R J ^a   Tao, Y ^a   Prinz, F B ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

AFM; FIB; Nano Electrodes; SECM; Tip Probe Array

Indexed keywords

ANISOTROPY; ASPECT RATIO; ATOMIC FORCE MICROSCOPY; CANTILEVER BEAMS; COMPOSITE MICROMECHANICS; DEPOSITION; ELECTROCHEMISTRY; ETCHING; ION BEAMS; MICROELECTRODES; REDOX REACTIONS; SCANNING ELECTRON MICROSCOPY; SURFACE REACTIONS; SURFACE TOPOGRAPHY; TRANSDUCERS;

ATOMIC FORCE MICROSCOPY (AFM); FOCUSED ION BEAM (FIB) TECHNOLOGY; NANO ELECTRODES; SCANNING ELECTROCHEMCIAL MICROSCOPY (SECM); TIP PROBE ARRAYS;

SILICON NITRIDE;

EID: 2142815380     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.524452     Document Type: Conference Paper

References (18)

1. A. J. Bard, F.-R. F. Fan, D. T. Pierce, P. R. Unwin, D. O. Wipf, F. Zhou, Science, 254, 68-74, 1991.
2. M. V. Mirkin, Mikrochim. Acta, 130, 127-153, 1999.
3. A. J. Bard F.-R. Fan, M. V. Mirkin, in Electroanalytical Chemsitry, Vol. 18, 243-273, A. J. Bard Ed.; Marcel Dekker; NewYork, 1994.
4. A.J. Bard, Fu-Ren F. Fan, Juh-youn, K Wak and Ovadia, Scanning Electrochemical Microscopy. Introduction and Principles, J. Anal. Chem. 61, 132-138, 1989.
5. A. J. Bard and M. V. Mirkin Ed., Scanning Electrochemical Microscopy, Marcel Dekker, New York, 2001.
6. F.-R. F. Fan and C. Demaille, In Scanning Electrochemical Microscopy, A. J. Bard and Michael V. Mirfin Ed., Marcel Dekker, New York, 2001.
7. Y. Shao and M. V. Mirkin, "Nanometer-Sized Electrochemical Sensors", J. Anal Chem., 69, 1727-1634, 1997.
8. P. Sun, Z. Zhang, J. Guo, and Y. Shao, "Fabrication of Nanometer-Sized Electrodes an Tips for Scanning Electrochemical Microscopy", J. Anal. Chem., 73, 5346-5351, 2001.
9. R. Fasching, Y. Tao, K. Hammerick, F. Prinz, A Pencil Probe System for Electrochemical Analysis and Modification in Nanometer Dimension, Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS Microtechnologies for the New Millenium 2003, Spain, (2003) 128-135.
10. D. Bonnell Ed., Scanning Probe Microscopy and Spectroscopy, Theory, Techniques and Applications, Wiley-VHX, New York, 2000.
11. M. Ludwig, C. Kranz, W. Schumann, H. E. Gaub Rev. Sci. Intrum., 66, 2857, 1995.
12. J. V. Macpherson, P. R. Unwin, J. Anal. Chem., 72, 276, 2001.
13. P. J. James, L. F. Garfias-Mesias, P. J. Moyer, W. H. Smyrl, J. Electrochem. Soc, 145, L64, 1998.
14. M. Buechler, S. C. Kelley, W. H. Smyrl, Electrochem. Solid State Lett., 3, 35, 2000.
15. C. Kranz, G. Friedbacher, B. Mizaikoff, a. Lugstein, J. Smoliner, E. Bertagnolli, "Integration an Ultramicroelectrode in an AFM cantilever: Combined Technology for Enhanced Information", J. Anal. Chem., 73, 2491-2500, 2001.
16. A. Boisen, O. Hansen and S. Boutwstra, "AFM probes with directly fabricated tips", J. Micromech. Microeng., 6, 58-62, 1996.
17. J. Itoh, Y. Tohma, S. Kanemaru and K. Shimizu, "Fabrication of an ultra sharp and high-aspect-ratio microprobe with a silicon-on-insulator wafer for scanning force microscopy", J. Vac. Sci. Technol. B. 13 (2), 331-334, 1995.
18. R. B. Marcus, T.S. Ravi, T. Gmitter, K. Chin, D. Lui, W.J. Orvis, D.R.Ciarlo, C.E. Hunt, J. Trujillo, "Formation of silicon tips with 1nm radius", J. Appl. Phys. Lett., 56, 236-238, 1990.