Model of plasma immersion ion implantation

Journal of Applied Physics

Volumn 66, Issue 7, 1989, Pages 2926-2929

  Lieberman, M A ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 2142778955     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.344172     Document Type: Article

References (0)