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Proceedings of the International Conference on Ion Implantation Technology

Volumn , Issue , 2000, Pages 468-471

Direct comparison of electrical performance of 0.1-μm pMOSFETs doped by Plasma Doping or low energy ion implantation

(8) Lenoble, D a Grouillet, A a Arnaud, F b Haond, M b Felch, S B c Fang, Z c Walther, S c Liebert, R B c

a ORANGE LABS (France)

b STMICROELECTRONICS (France)

c VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADVANCED CMOS; DEVICE PERFORMANCE; ELECTRICAL PERFORMANCE; IMPLANTATION TECHNIQUE; JUNCTION DEPTH; LATERAL SPREAD; LOW ENERGY ION IMPLANTATION; P-MOSFETS; PLASMA DOPING; SOURCE/DRAIN EXTENSION; SUBMICROMETERS; ULTRA SHALLOW JUNCTION;

CMOS INTEGRATED CIRCUITS; MOSFET DEVICES; SEMICONDUCTOR DOPING;

ION IMPLANTATION;

EID: 2142737101 PISSN: None EISSN: None Source Type: Conference Proceeding
DOI: 10.1109/.2000.924189 Document Type: Conference Paper

Times cited : (16)

References (10)

1
- 0004245602
- San Jose : SIA
- International Technology Roadmap for Semiconductors, San Jose : SIA, 1999
- (1999) International Technology Roadmap for Semiconductors

2
- 78649876118
- D. Lenoble, M.J. Goekner, S.B. Felch, Z. Fang, J. Galvier, A. Gouillet, Proceedings of IIT 1998
- (1998) Proceedings of IIT
- Lenoble, D.¹ Goekner, M.J.² Felch, S.B.³ Fang, Z.⁴ Galvier, J.⁵ Gouillet, A.⁶

3
- 0005844185
- Leuven (Belgium)
- D. Lenoble, J. Alieu, A. Grouillet, M. Haond, S.B. Felch, M.J. Goeckner, Z. Fang, Proceedings of ESSDERC, Leuven (Belgium), 1999
- (1999) Proceedings of ESSDERC
- Lenoble, D.¹ Alieu, J.² Grouillet, A.³ Haond, M.⁴ Felch, S.B.⁵ Goeckner, M.J.⁶ Fang, Z.⁷

4
- 78649874399
- these proceedings
- S. Walther, D. Lenoble, Z. Fang, R.B. Liebert, these proceedings
- Walther, S.¹ Lenoble, D.² Fang, Z.³ Liebert, R.B.⁴

5
- 78649849783
- M.A. Albano, V. Babaram, J.M. Poate, M. Sosnowski, D.C. Jacobson, Mat. Res. Soc. Proceedings. Vol. 610,2000
- (2000) Mat. Res. Soc. Proceedings. , vol.610
- Albano, M.A.¹ Babaram, V.² Poate, J.M.³ Sosnowski, M.⁴ Jacobson, D.C.⁵

6
- 78649878695
- Hawai
- D. Lenoble, F. Arnaud, A. Grouillet, R. Lieben, S. Walther, S.B. Felch, Z. Fang, M. Haond, Proceedings of the 2000 VLSI Symposium, Hawai, 2000
- (2000) Proceedings of the 2000 VLSI Symposium
- Lenoble, D.¹ Arnaud, F.² Grouillet, A.³ Lieben, R.⁴ Walther, S.⁵ Felch, S.B.⁶ Fang, Z.⁷ Haond, M.⁸

7
- 78649852497
- these proceedings
- A. Halimaoui, D. Lenoble, A. Grouillet, J. Weeman, Z. Fang, S. Mehta, these proceedings
- Halimaoui, A.¹ Lenoble, D.² Grouillet, A.³ Weeman, J.⁴ Fang, Z.⁵ Mehta, S.⁶

8
- 78649820036
- these proceedings
- R.B. Liebert, S. Walther, S. Felch, Z. Fang, B. Pedersen, D. Hacker, these proceedings
- Liebert, R.B.¹ Walther, S.² Felch, S.³ Fang, Z.⁴ Pedersen, B.⁵ Hacker, D.⁶

9
- 78649885947
- these proceedings
- S.B. Felch, D. Lenoble, A. Grouillet, S. Walther, Z. Fang, B. W. Koo, R.B. Liebert., these proceedings
- Felch, S.B.¹ Lenoble, D.² Grouillet, A.³ Walther, S.⁴ Fang, Z.⁵ Koo, B.W.⁶ Liebert, R.B.⁷

10
- 0005790510
- Cork (Ireland)
- D. Lenoble, E. Josse, A. Grouillet, C. Julien, T. Skotnicki, S. Walther, R.B. Liebert et al., Proceedings of ESSDERC, Cork (Ireland), 2000
- (2000) Proceedings of ESSDERC
- Lenoble, D.¹ Josse, E.² Grouillet, A.³ Julien, C.⁴ Skotnicki, T.⁵ Walther, S.⁶ Liebert, R.B.⁷

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.