Sensitivity of Piezoresistive Readout Device for Microfabricated Acoustic Spectrum Analyzer

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5344, Issue , 2004, Pages 36-43

  Stalford, Harold L ^a,b,c   Apblett, Chris ^a,b   Mani, Seethambal S ^a,d   Schubert, W Kent ^a,b   Jenkins, Mark ^a,e  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b Microdevice Technologies   (United States)

^c UNIVERSITY OF OKLAHOMA   (United States)

^d MEMS

^e SN   (United States)

Author keywords

MEMS; Microfabricated acoustic spectrum analyzer; Piezoresistive readout; Resonant sensors; Surface micromachining

Indexed keywords

MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS); MICROFABRICATED ACOUSTIC SPECTRUM ANALYZER; PIEZORESISTIVE READOUT DEVICES; RESONANT SENSORS; SURFACE MICROMACHINING;

ACOUSTIC SIGNAL PROCESSING; DIELECTRIC MATERIALS; DIGITAL SIGNAL PROCESSING; MICROELECTROMECHANICAL DEVICES; POLYSILICON; RESONATORS; SPECTRUM ANALYZERS; VACUUM APPLICATIONS;

PIEZOELECTRIC DEVICES;

EID: 2142705429     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.524628     Document Type: Conference Paper

References (6)

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4. Eaton, W. P., Surface Micromachined Pressure Sensors, Ph.D. Dissertation, University of New Mexico, 1997.
5. Gere, James M., Mechanics of Materials, Fifth Edition, Brooks/Cole, 2001.
6. Johnson, William A. and Warne, Larry K., "Electrophysics of Micromechanical Comb Actuators," J. Microelectromechanical Systems, Vol. 4, No. 1, March 1995, pp. 49-59.