Thick microlens array fabricated by soft-lithography in hybrid sol-gel glass

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5347, Issue , 2004, Pages 103-110

  Yuan, X C ^a   Yu, Weixing ^a   Kudryashov, V ^a   Moh, K J ^a   Ngo, N Q ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Microlens array; Microoptical elements; Soft lithography; Sol gel

Indexed keywords

MICROLENS ARRAYS; MICROOPTICAL ELEMENTS; SOFT LITHOGRAPHY;

DENSIFICATION; ELASTOMERS; GUIDED ELECTROMAGNETIC WAVE PROPAGATION; MICROOPTICS; PHOTORESISTS; SOL-GELS; ULTRAVIOLET RADIATION;

MICROLENSES;

EID: 2142666995     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.524204     Document Type: Conference Paper

References (4)

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