MEMS Process Error Characterization Using Lateral Resonant Structures

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5343, Issue , 2004, Pages 264-272

  Johnson, George C ^a   Allen, A Miller ^b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b APPLIED MATERIALS INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; ELASTIC MODULI; ERROR DETECTION; FUNCTIONS; MATHEMATICAL MODELS; NATURAL FREQUENCIES; OPTIMIZATION; POLYNOMIALS;

LATERAL RESONANT STRUCTURES; MASS DENSITY; MATERIAL PARAMETERS; OPTIMIZED DESIGNS;

MICROELECTROMECHANICAL DEVICES;

EID: 2142647511     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.524236     Document Type: Conference Paper

References (5)

1. Gupta, R. "Electronically Probed Measurements of MEMS Geometries", Journal of Micro-electro-mechanical Systems, vol. 9, no.3, Sept. 2000, p. 380-389.
2. Timoshenko, S., Strength of Materials I, pp. 171-174, D. Van Nostrand and Co., Inc., Princeton, New Jersey, 1930.
3. O'Donnell, W. J. "The Additional Deflection of a Cantilever Due to the Elasticity of the Support", Journal of Applied Mechanics, pp. 461-464, September 1960.
4. Sharpe, W. N., K.T. Turner, and R.L. Edwards. Tensile Testing of Polysilicon." Experimental Mechanics vol. 39 no. 3 (September 1999): pp. 162-170.
5. Strang, Gilbert. Linear Algebra and its Applications. Orlando: Harcourt Brace Jovanovich College Publishers, 1988.