Oxygen-plasma-enhanced crystallization of a-Si:H films on glass

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 12, Issue 4, 1994, Pages 1237-1240

  Yin, Aiguo ^a   Fonash, S J ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 21344491521     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.579301     Document Type: Conference Paper

References (7)

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