Material properties and tribological performance of hydrogenated sputter carbon overcoat on rigid disk

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 11, Issue 6, 1993, Pages 3007-3013

  Lee, H J ^a   Zubeck, R ^a   Hollars, D ^a   Lee, J K ^a   Smaller, M ^a   Chao, A ^a  

^a Conner Peripherals ^*  (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 21344482790     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.578289     Document Type: Article

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