Deterministic control of thin film thickness in physical vapor deposition systems using a multi-aperture mask

Optics Express

Volumn 13, Issue 7, 2005, Pages 2731-2741

  Arkwright, John ^a   Underhill, Ian ^a   Pereira, Nathan ^a   Gross, Mark ^a  

^a CSIRO   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC FILMS; ION BEAMS; LITHIUM COMPOUNDS; MAGNETIC STORAGE; MICROELECTRONICS; NIOBIUM COMPOUNDS; POLISHING; SPUTTERING; SUBSTRATES; THIN FILMS;

MULTI APERTURE MASKS; OPTICAL FABRICATION; THIN FILMS - COATINGS; THIN FILMS - DEPOSITION AND FABRICATION;

PHYSICAL VAPOR DEPOSITION;

EID: 21244489004     PISSN: 10944087     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OPEX.13.002731     Document Type: Article

References (7)

1. P. W. Baumeister, Optical Coating Technology (SPIE Press, Washington, 2004), Chapter 9 and references therein.
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3. J. M. Mackowski, L. Pinard, L. Dognin, P. Ganau, B. Lagrange, C. Michel, M. Morgue, "Different approaches to improve the wavefront of low-loss mirrors used in the Virgo gravitational wave antenna," Applied Surface Science 86-90 (1999).
4. C. D. Prasad, S. K. Mathew, A. Bhatnagar, A Ambastha, "Solar photospheric and chromospheric observations using a lithium niobate Fabry-Perot etalon," Experimental Astronomy 125-133, (1998).
5. A. J. Leistner, "Teflon polishers: their manufacture and use," Applied Optics 293, (1976).
6. J. A. Seckold, "Precision flat polishing of lithium niobate," Optical Fabrication and Testing OSA Technical Digest Series Optical Society of America, Washington, D. C. (1996).
7. P. S. Fairman, D. I. Farrant, and J. W. Arkwright, CSIRO Industrial Physics are preparing a manuscript to be called "High resolution metrology of high-finesse Fabry Perot structures"