Aluminum Nitride Thin Film Sensor for Force, Acceleration, and Acoustic Emission Sensing

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 11, Issue 5, 1993, Pages 2437-2446

  Zheng, L ^a   Ramalingam, S ^a   Shi, T ^a   Peterson, R L ^a  

^a UNIVERSITY OF MINNESOTA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 21144476243     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.578589     Document Type: Article

References (21)

1. S. Birla, GM Tech Center Report No. GMMD-80-026, General Motors Technical Center, Warren, MI, 1980.
2. J. Tlusty and G. C. Andrews, Ann. CIRP 34, 87 (1985).
3. T. Moriwaki and K. Iwata, Ann. CIRP 25, 21 (1977).
4. Y. Kakino, J. Acou. Emis. 5, 108 (1984).
5. W. P. Robbins, B. Bischoff, and S. Ramalingam, Thin Solid Films 166, 387 (1988).
6. T. Ikeda, Fundamentals of Piezoelectricity (Oxford University Press, Oxford, England, 1990), p 222.
7. D. L. Polla, Ph.D. dissertation, University of California, Berkeley, CA, 1985.
8. B. Bischoff, M.S. thesis, University of Minnesota, Minneapolis, MN, 1985.
9. B. Bischoff et al., in Sensors for Manufacturing, ASME Special Publication PED-26 (ASME, New York, 1987), p. 69.
10. N. N. Hsu, U.S. Patent No. 4 018 084, 1976.
11. R. M. White, IEEE Trans. Son. Ultrason. SU-28, 8 (1981).
12. H. Holleck, in Hartstoffschichten zur Versehieissminderung, edited by H. Flischmeister and H. Jehn (Informations Gesellschaft Verlag, city, 1986), p. 25.
13. K. H. Muller, J. Appl. Phys. 58, 2573 (1985).
14. J. A. Thornton, Annu. Rev. Mater. Sci. 7, 239 (1977).
15. H. Pulker, Coatings on Glass (Elsevier, Amsterdam, 1984).
16. Q. Zhenxing, Z. Xiaozhong, Z. Mingzhou, W. Xizhang, and L. Yujin, IEEE Trans. Son. Ultrason. SU-32, 630 (1985).
17. W. B. Carter and M. V. Papageorge, J. Vac. Sci. Technol. A 10, 3460 (1992).
18. Electronic Materials Handbook (American Society for Metals, Metals Park, OH, 1989), Vol. 1, p. 1120.
19. Metals Handbook, 7th ed. (American Society for Metals, Metals Park, OH, 1967), Vol. 1, p. 664.
20. Wear Control Handbook, edited by M. B. Peterson and W. O. Winer (ASME, New York, 1980), p. 1317.
21. Ultrasonic Testing, edited by P. Mclntire (American Society for Nondestructive Testing, Columbus, OH, 1991), p. 849.