Removing the Energetic Neutral Problem in Sputtering

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 11, Issue 4, 1993, Pages 1522-1527

  Window, B ^a  

^a CSIRO INDUSTRIAL PHYSICS   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 21144471705     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.578695     Document Type: Conference Paper

References (24)

1. B. Chapman, Glow Discharge Processes (Wiley, New York, 1980).
2. B. Window and G. L. Harding, J. Vac Sci. Technol. A 8, 1277 (1990).
3. L. A. Gilbert, R. Messier, and S. Krishnaswamy, J. Vac. Sci. Technol. 17, 389 (1980).
4. R. Messier and D. J. Kester, Appl. Surf. Sci. 22/23, 486 (1985).
5. J. A. Thornton, J. Tabock, and D. W. Hoffman, Thin Solid Films 64, 111 (1979).
6. B. W. Hoffman and J. A. Thornton, J. Vac. Sci. Technol. 17, 380 (1980).
7. J. P. Biersack and L. G. Haggmark, Nucl. Instrum. Methods 174, 257 (1980).
8. H. F. Winters, H. Coufal, C. T. Rettner, and D. S. Bethune, Phys. Rev. B 41, 6240 (1990).
9. H. Coufal, H. F. Winters, H. L. Bey, and W. Eckstein, Phys. Rev. B 44, 4747 (1991).
10. J. A. Thornton and J. L. Lamb, Thin Solid Films 119, 87 (1984).
11. D. W. Hoffman, J. Vac. Sci. Technol. A 8, 3707 (1990).
12. F. M. D’Heurle, Metall. Trans. 1, 725 (1970).
13. D. W. Hoffman and J. A. Thornton, Thin Solid Films 40, 355 (1977).
14. J. A. Thornton and D. W. Hoffman, J. Vac. Sci. Technol. 14, 164 (1977).
15. D. W. Hoffman and J. A. Thornton, Thin Solid Films 45, 387 (1977).
16. D. W. Hoffman and J. A. Thornton, J. Vac. Sci. Technol. 16, 134 (1979).
17. J. A. Thornton and D. W. Hoffman, J. Vac. Sci. Technol. 18, 203 (1981).
18. J. A. Thornton and D. W. Hoffman, J. Vac. Sci. Technol. A 3, 576 (1985).
19. B. Window and K. H. Muller, Thin Solid Films 171, 183 (1989).
20. M. Doeraer, D. S. Gardner, and W. D. Nix, J. Mater, Res. 1, 845 (1986).
21. B. Window, F. Sharples, and N. Savvides, J. Vac. Sci. Technol. A 6, 2333 (1988).
22. S. Rossnagel, J. Vac. Sci. Technol. A 7, 1025 (1989).
23. H. F. Winters and E. Kay, J. Appl. Phys. 38, 3928 (1967).
24. B. Window and G. L. Harding, J. Vac. Sci. Technol. A 11, 1447 (1993).