Influence of Different Etching Mechanisms on the Angular Dependence of Silicon Nitride Etching

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 11, Issue 4, 1993, Pages 1226-1229

  Barklund, A M ^a   Blom, H O ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 21144470244     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.578497     Document Type: Conference Paper

References (11)

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