Double Langmuir Probe Diagnostic of a Resonant Cavity Microwave Discharge

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 11, Issue 4, 1993, Pages 1152-1155

  McColl, W ^a   Brooks, C ^a   Brake, M L ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 21144461464     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.578457     Document Type: Conference Paper

References (17)

1. M. L. Passow, M. L. Brake, P. Lopez, W. McColl, and T. Repetti, IEEE Trans. Plasma Sci. PS-19, 219 (1991).
2. J. Rogers, Ph. D. thesis, Michigan State University, 1982 (unpublished).
3. W. McColl, M. S. thesis, University of Michigan, 1990 (unpublished).
4. S. J. Buchsbaum and S. C. Brown, Phys. Rev. 106, 196 (1957).
5. S. J. Buchsbaum, L. Mower, and S. C. Brown, Phys. Fluids 3, 806 (1960).
6. W. McColl, M. Passow, and M. L. Brake, Rev. Sci. Instrum. 63, 1792 (1992).
7. J. Hopwood, R. Wagner, D. K. Reinhard, and J. Asmussen, J. Vac. Sci. Technol. A 8, 2904 (1990).
8. J. Hopwood, D. K. Reinhard, and J. Asmussen, J. Vac. Sci. Technol. A 8, 3103 (1990).
9. J. Asmussen, R. Mallavarpu, J. Hamann, and H. Park, Proc. IEEE 62, 109 (1974).
10. R. Mallavarpu, J. Asmussen, and M. C. Hawley, IEEE Trans Plasma Sci. PS-6, 341 (1978).
11. R. F. Harrington, Time-Harmonic Electromagnetic Fields (McGraw-Hill, New York, 1961).
12. J. D. Swift and M. J. R. Schwar, Electrical Probes for Plasma Diagnostics (Xliffe, London, 1969).
13. E. O. Johnson and L. Malter, Phys. Rev. 80, 58 (1950).
14. T. Dote, Jpn. J. Appl. Phys. 7, 964 (1968).
15. S. Yamaguchi, G. Sawa, and M. leda, J. Appl. Phys. 6, 2363 (1977).
16. N. Hershkowitz, in Plasma Diagnostics, edited by O. Auciello and B. L. Flamm (Academic, San Diego, 1989), Vol. 1.
17. S. C. Brown, Introduction to Electrical Discharges in Gases (Wiley, New York, 1966).