The effect of CO2 on the plasma remediation of NxOy

Applied Physics Letters

Volumn 68, Issue 15, 1996, Pages 2064-2066

  Gentile, Ann C ^a   Kushner, Mark J ^a  

^a University of Illinois at Urbana Champaign   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 21044459686     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.116304     Document Type: Article

References (11)

1. See for example J. D. Splenger, M. Brauer, and P. Koutrakis, Environ. Sci. 24, 946 (1990); L. T. Fairhall, Industrial Toxicology (Hafner Publishing Company, New York, 1969).
2. A collection of papers on various plasma technologies being investigated for remediation of toxic gases appears in Proceedings of the NATO Advanced Research Workshop on Non-Thermal Plasma Techniques for Pollution Control, edited by B. Penetrante and S. Schulthesis (Springer-Verlag, Berlin, 1993).
3. A. C. Gentile and M. J. Kushner, J. Appl. Phys. 78, 2074 (1995).
4. A. C. Gentile and M. J. Kushner, J. Appl. Phys. (to be published).
5. M. B. Chang, J. H. Balbach, M. J. Rood, and M. J. Kushner, J. Appl. Phys. 69, 4409 (1991).
6. D. Evans, L. A. Rosocha, G. K. Anderson, J. J. Coogan, and M. J. Kushner, J. Appl. Phys. 74, 5378 (1993).
7. J. O. Hirschfelder, C. F. Curtiss, and R. B. Bird, Molecular Theory of Gases and Liquids (Wiley, New York, 1954).
8. R. Atkinson, D. L. Baulch, R. A. Cox, R. F. Hampson, Jr., J. A. Kerr, and J. Troe, J. Phys. Chem. Ref. Data 18, 881 (1989).
9. F. Westley, J. T. Herron, R. J. Cvetanovic, R. F. Hampson, and W. G. Mallard, NIST Chemical Kinetics Database, NIST Standard Reference Database 17, National Institute of Standards and Technology, Gaithersburg, MD 20899.
10. M. Hayashi in Nagoya Institute of Technology Report No. IPPI-AM-19, 1991.
11. M. Hayashi, in Swarm Studies and Inelastic Electron-Molecular Collisions, edited by L. C. Pitchford, B. V. McKoy, A. Chutjian, and S. Tratmar (Springer-Verlag, New York, 1987).