Fabrication of microneedle array using LIGA and hot embossing process

Microsystem Technologies

Volumn 11, Issue 4-5, 2005, Pages 311-318

  Moon, Sang Jun ^a   Lee, Seung S ^a   Lee, H S ^a   Kwon, T H ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Blood extraction; Drug delivery; Hot embossing; Inclined deep X ray process; Microneedle array

Indexed keywords

ARRAYS; ASPECT RATIO; BLOOD; CONTROLLED DRUG DELIVERY; ELECTROPLATING; INJECTION MOLDING; POLYMETHYL METHACRYLATES; SCANNING ELECTRON MICROSCOPY; SKIN; X RAY ANALYSIS;

BLOOD EXTRACTION; DRUG DELIVERY; HOT EMBOSSING; INCLINED DEEP X-RAY PROCESS; MICRONEEDLE ARRAYS;

NEEDLES;

EID: 21044448226     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-004-0446-8     Document Type: Conference Paper

References (13)

1. Champin RH; Burton JL; Ebling FJG (eds) (1992) Textbook of dermatology. Blackwell, London
2. Liwei Lin; Albert P. Pisano (1999) Silicon-processed microneedles, IEEE J MEMS 8: 78-84
3. Gardeniers JGE; Bereaschot JW; de Boer MJ; Yeshurun Y; Hefetzra M; van't Oever R; van den Berg A (2002) Silicon micromachined hollow microneedles for transdermal liquid transfer, The 15th IEEE International conference on Micro Electro Mechanical Systems. Las Vegas, Nevada, January 20-24, pp.141-144
4. Sebastien Henry; Devin V. AcAllister; Mark G. Allen; Mark R. Prausnitz (1998) Microfabricated microneedles: a Novel approach to transdermal drug delivery. J Pharmaceutical Sci 87: 922-925
5. Patrick Griss; Goran Stemme (2002) Novel, side opened out-of-plane microneedles for microfluidic transdermal interfacing, The 15th IEEE International Conference on Micro Electro Mechanical Systems, Las Vegas, Nevada, January 20-24, pp. 467-470
6. Achim Trautmann; Patrick Ruther; Oliver Paul (2003) Microneedle arrays fabricated using suspended etch mask technology combined with fluidk through wafer vias, IEEE The 16th Annual International Conference on Micro Electro Mechanical Systems, Kyoto, January 19-23, pp. 682-685
7. Jeffrey D. Zahn; Neil H. Talbot; Dorian Liepmann; Albert P. Pisano (2000) Microfabricated polysilicon microneedles for minimally invasive biomedical devices. Biomedical microdevices, 2: 295-303
8. Boris Stoeber, Dorian Liepmann (2000) Fluid injection through out-of-plane microneedles. 1st Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine & Biology, Lyon, October 12-14, pp. 224-228
9. Mitsuhiro Shikida; Michiaki Odagaki; Nobuo Todoroki; Masaki Ando; Yuji Ishihara; Taeko Ando; Kazuo Sato (2003) Non-photolithographic pattern transfer for fabricating arrayed 3-D microstructures by chemical anisotropic etching. IEEE The 16th Annual International Conference on Micro Electro Mechanical Systems, Kyoto, January 19-23, pp. 562-565
10. Ramachandran Trichur; Sanghyo Kim; Xiaoshan Zhu; Ji Won Suk; Chien-Chong Hong; Jin-Woo Choi; Chong H. Ahn (2002) Development of plastic microneedles for transdermal interfacing using injection molding techniques. Micro total analysis system 2002, Nara, November 3-7, Vol. 1, pp. 395-397
11. Shankar Chandrasekaran; Bruno Frazier A (2003) Characterization of surface micromachined hollow metallic microneedles, IEEE The 16th Annual International Conference on Micro Electro Mechanical Systems, Kyoto, January 19-23, pp. 363-366
12. Jung-Hwan Park; Shawn Davis; Young-Kyu Yoon; Mark R. Prausnitz; Mark G. Allen (2003) Micromachined biodegradable microstructures. IEEE The 16th Annual International Conference on Micro Electro Mechanical Systems, Kyoto, January 19-23, pp. 371-374
13. Dong-Young Oh; Seung S. Lee (2001) A tetrahedral three-facet micro mirror with the inclined deep X-ray process. Sensor and Actuators A93: 157-161