Microfabricated SrTi O3 ridge waveguides

Applied Physics Letters

Volumn 86, Issue 22, 2005, Pages 1-3

  Gaidi, M ^a   Stafford, L ^b   Margot, J ^b   Chaker, M ^a   Morandotti, R ^a   Kulishov, M ^c  

^a INSTITUT NATIONAL DE LA RECHERCHE SCIENTIFIQUE   (Canada)

^b UNIVERSITÉ DE MONTRÉAL   (Canada)

^c Adtek Photomask Inc   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

FERROELECTRIC MATERIALS; LIGHT TRANSMISSION; PHOTOLITHOGRAPHY; PLASMA ETCHING; REFRACTIVE INDEX; STRONTIUM COMPOUNDS; TELECOMMUNICATION; ULTRAVIOLET RADIATION;

FABRY-PEROT RESONANCE METHODS; INFRARED WAVELENGTH; RIDGE WAVEGUIDES; TELECOMMUNICATION WAVELENGTH;

OPTICAL WAVEGUIDES;

EID: 20844438814     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1942634     Document Type: Article

References (17)

1. M. Wöhlecke, V. Marello, and A. Onton, J. Appl. Phys. 48, 1748 (1977).
2. M. Gaidi, L. Stafford, A. Amassian, M. Chaker, J. Margot, L. Martinu, and M. Kulishov, J. Mater. Res. 84, 3609 (2004).
3. S. H. Hu, X. J. Meng, G. J. Hu, J. H. Chu, N. Dai, L. Xu, L. Y. Liu, and D. X. Li, Appl. Phys. Lett. 84, 3609 (2004).
4. F. Sanchez, M. Varela, X. Queralt, R. Aguiar, and J. L. Morenza, Appl. Phys. Lett. 61, 2228 (1987).
5. S. H. Nam and H. G. Kim, J. Appl. Phys. 72, 2895 (1992).
6. G. M. Rao and S. B. Krupanidhi, J. Appl. Phys. 75, 2604 (1994).
7. M. H. Yeh, K. S. Liu, and I. Nan, Jpn. J. Appl. Phys., Part 1 34, 2247 (1995).
8. F. J. Walker, R. A. Mckee, H. W. Yen, and D. E. Zelmon, Appl. Phys. Lett. 65, 1495 (1994).
9. M. A. El Khakani, M. Chaker, and E. Gat, Appl. Phys. Lett. 69, 2027 (1996).
10. S. Zollner, A. A. Demkov, R. Liu, P. L. Fejes, R. B. Gregory, P. Alluri, J. A. Curless, Z. Yu, J. Ramdani, R. Droopad, T. E. Tiwald, J. N. Hilffiker, and J. A. Wollam, J. Vac. Sci. Technol. B 18, 2242 (2000).
11. L. Stafford, M. Gaidi, M. Chaker, O. Langlois, J. Margot, F. Schiettekatte, and P. Wei, Appl. Phys. Lett. 84, 2500 (2004).
12. L. Stafford, J. Margot, O. Langlois, and M. Chaker, J. Vac. Sci. Technol. A 21, 1247 (2003).
13. N. Ponnampalam, R. G. DeCorby, H. T. Nguyen, P. K. Dwivedi, C. J. Haugen, and J. N. McMullin, Opt. Express 12, 6270 (2004).
14. E. Kapon and R. Bhat, Appl. Phys. Lett. 50, 1628 (1987).
15. R. G. Walker, Electron. Lett. 21, 581 (1985).
16. D. M. Gill, B. A. Block, C. W. Conrad, B. W. Wessels, and S. T. Ho, Appl. Phys. Lett. 69, 2968 (1996).
17. R. G. Hunsperger, Integrated Optics, 5th ed. (Springer, New York, 2002), Chap..