Polytype control and properties of AlN on silicon

Physica Status Solidi C: Conferences

Volumn 2, Issue 7, 2005, Pages 2199-2203

  Cimalla, V ^a   Lebedev, V ^a   Kaiser, U ^a   Goldhahn, R ^a   Foerster, Ch ^a   Pezoldt, J ^a   Ambacher, O ^a  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

PHONONS; SILICON; SUBSTRATES; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

PHONON LINES; POLYTYPE REPLICATION; SPECTROSCOPIC ELLIPSOMETRY;

ALUMINUM NITRIDE;

EID: 20744454314     PISSN: 16101634     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1002/pssc.200461579     Document Type: Conference Paper

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