Excitation and detection of silicon-based micromechanical resonators

Sensors and Materials

Volumn 9, Issue 8, 1997, Pages 521-540

  Tilmans, Harrie A C ^a,c   Bouwstra, Siebe ^b  

^a UNIVERSITY OF LEUVEN   (Belgium)

^b TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

^c CP Clare Corporation   (Belgium)

Author keywords

Detection; Equivalent circuit; Excitation; Micromechanics; Modal analysis; One port; Resonator; Transduction; Two port

Indexed keywords

EID: 20544458629     PISSN: 09144935     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (2)

1. J. C. Greenwood: Silicon Transducer (Patent specification 1588669, London, 1978).
2. J. G. Smits, H. A. C. Tilmans, K. Hoen, H. Mulder, J. van Vuuren and G. Boom: Sensors and Actuators 4 (1983) 565.