Characterisation of thin layers of parylene at high frequency using PZT thick film resonators

Journal of the European Ceramic Society

Volumn 25, Issue 12 SPEC. ISS., 2005, Pages 2985-2989

  Levassort, Franck ^a   Tran Huu Hue, Louis Pascal ^a   Marechal, Pierre ^a   Ringgaard, Erling ^b   Lethiecq, Marc ^a  

^a UNIVERSITÉ DE TOURS   (France)

^b Ferroperm Piezoceramics A/S   (Denmark)

Author keywords

Biomedical applications; Impedance; Mechanical properties; PZT; Tape casting

Indexed keywords

ACOUSTIC IMPEDANCE; DEPOSITION; ELECTRIC IMPEDANCE; ELECTRIC VARIABLES MEASUREMENT; MEDICAL IMAGING; RESONATORS; TRANSDUCERS;

ACOUSTIC MATCHING; MATCHING LAYERS; PARYLENE; THICK FILM RESONATORS;

THICK FILM DEVICES;

CERAMICS;

EID: 20444504723     PISSN: 09552219     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jeurceramsoc.2005.03.208     Document Type: Article

References (8)

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