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Volumn 105, Issue 1, 2002, Pages 27-
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Supercritical carbon dioxide
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NONE
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Author keywords
[No Author keywords available]
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Indexed keywords
COFFEE BEANS;
COMPUTER CHIPS;
PERCHLOROETHYLENE;
SEMICONDUCTOR INDUSTRY;
ATMOSPHERIC PRESSURE;
CONSUMER ELECTRONICS;
GLOBAL WARMING;
INTEGRATED CIRCUITS;
MICROELECTRONICS;
MICROPROCESSOR CHIPS;
SEMICONDUCTOR DEVICE MANUFACTURE;
SOLVENTS;
SUPERCRITICAL FLUIDS;
SURFACE TENSION;
TRANSISTORS;
VISCOSITY;
CARBON DIOXIDE;
PHASEOLUS (ANGIOSPERM);
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EID: 20444405635
PISSN: 1099274X
EISSN: None
Source Type: Trade Journal
DOI: None Document Type: Short Survey |
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Times cited : (3)
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References (0)
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