Study of Al-O-N Cr-O-N films deposited by arc ion plating as diffusion barriers

Jinshu Xuebao/Acta Metallurgica Sinica

Volumn 40, Issue 1, 2004, Pages 83-87

  Wang, Qimin ^a   Wu, Yingna ^a   Ji, Ailing ^a   Ke, Peiling ^a   Sun, Chao ^a   Huang, Rongfang ^a   Wen, Lishi ^a  

^a INSTITUTE OF METAL RESEARCH   (China)

Author keywords

Al O N; Arc ion plating (AIP); Cr O N; Diffusion barrier layer

Indexed keywords

EID: 2042511620     PISSN: 04121961     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (13)