Microsystem cooler development

Collection of Technical Papers - 2nd International Energy Conversion Engineering Conference

Volumn 2, Issue , 2004, Pages 769-778

  Moran, Matthew E ^a,c   Wesolek, Danielle M ^b,d   Berhane, Bruk T ^b,d   Rebello, Keith J ^b,d  

^a NASA GLENN RESEARCH CENTER   (United States)

^b JOHNS HOPKINS UNIVERSITY APPLIED PHYSICS LABORATORY   (United States)

^c Electro Physics Branch   (United States)

^d Research and Technology Development Center   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; COMPUTER SIMULATION; NICKEL; PHOTORESISTORS; REACTIVE ION ETCHING; STAINLESS STEEL;

DEEP REACTIVE ION ETCHING (DRIE); MICRO-REGENERATORS; MICROARRAYS; MICROSYSTEM COOLER DEVELOPMENT;

COOLING SYSTEMS;

EID: 20344403547     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.2514/6.2004-5611     Document Type: Conference Paper

References (6)

1. Moran, M.E. "Micro-Scale Avionics Thermal Management", 34th International Symposium on Microelectronics (IMAPS), Oct 9-11, 2001 (NASA TM-2001-211095, Aug, 2001).
2. Stetson, N.B., "Miniature Integral Stirling Cryocooler", U.S. Patent No. 5,056,317, October 15, 1991.
3. Solomon, R., "Integrated Refrigerated Computer Module", U.S. Patent No. 5,349,823 (Assignee: Intel Corp.), September 27, 1994.
4. Bowman, L., et.al., "Microminiature Stirling Cycle Cryocoolers and Engines", U.S. Patent No. 5,457,956 (10/17/95) and continued-in-part in 5,749,226 (5/12/98) and 5,941,079 (8/24/99) (Assignee: Ohio Univ.).
5. Moran, M.E., "Micro-Scalable Thermal Control Device", US Patent No. 6,385,973 B1, May 14, 2002.
6. Moran, M.E., "Multidisciplinary Analysis of a Microsystem Device for Thermal Control", Proceedings of the 11th Thermal & Fluids Analysis Workshop, Cleveland, OH, August 21-25, 2000.