Measurement of specific contact resistivity of ohmic contact on p-GaN

Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors

Volumn 26, Issue 5, 2005, Pages 965-969

  Xue, Song ^a   Han, Yanjun ^a   Wu, Zhen ^a   Luo, Yi ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

CTLM; p GaN; SCR; TLM

Indexed keywords

ANNEALING; ELECTRIC RESISTANCE MEASUREMENT; MATHEMATICAL MODELS; OHMIC CONTACTS;

ANNEALING TEMPERATURE; DOT CIRCULAR TRANSMISSION LINE MODEL; SPECIFIC CONTACT RESISTIVITY; TRANSMISSION LINE MODEL METHODS;

GALLIUM NITRIDE;

EID: 20344394191     PISSN: 02534177     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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