Interconnect constraints on BEOL manufacturing

10th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop, ASMC 1999

Volumn , Issue , 1999, Pages 304-308

  Mangaser, R ^a   Mark, C ^a   Rose, K ^a  

^a RENSSELAER POLYTECHNIC INSTITUTE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BUSBARS; INTEGRATED CIRCUIT INTERCONNECTS; SEMICONDUCTOR DEVICE MANUFACTURE;

CMOS DEVICES; COPPER TECHNOLOGY; DEEP SUB-MICRON; LOCAL INTERCONNECTS; MANUFACTURABILITY; RANDOM DEFECTS; SIGNAL INTEGRITY;

MANUFACTURE;

EID: 20344389935     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ASMC.1999.798251     Document Type: Conference Paper

References (14)

1. M. Bohr, S. Ahmed, et al. , IEDM, 1996.
2. M. R. Choudhury, J. S. Miller, IEEE ISSCC, 1997.
3. J. Schutz, R. Wallace, IEEE ISSCC, 1998, .
4. S. Fischer, R. Senthinathan, et al. , IEEE ISSCC, 1999.
5. S. Yang, S. Ahmed, et al, IEDM, 1998.
6. B. M. Geuskens, K. Rose, "Modeling Microprocessor Performance", Kluwer Academic Publishers, 1998.
7. S. Yang, MRS Symposium Proc. U ( S . P . Murarka et al. , Eds. ), 1998.
8. D. Edelstein, J. Heidenreich, et al. , IEDM, 1997.
9. A. K. Stamper, T. L. McDevitt, S. L. Luce, IEEE/SEMI ASMC, 1998.
10. L. Chan, B. Geuskens, et al, IEEE/SEMI ASMC, 1997.
11. S. Fitzpatrick, G. ODonoghue, and Gary Cheek, IEEE/SEMI ASMC, 1998.
12. D. Maynard, R. Rosner, et al. , IEEEBEMI ASMC, 1998.
13. T. Sakurai, IEEE Tms. on Electron Devices, Jan. 1993.
14. T. Sakurai, S. Kobayashi, M. Noda, Proc. of Int. Symp. On Circuits and Systems (Singapore), Jun. 1991.