Atomic force microscope based nanomanipulator for mechanical and optical lithography

2004 4th IEEE Conference on Nanotechnology

Volumn , Issue , 2004, Pages 468-470

  Rubio Sierra, F J ^a   Burghardt, S ^a   Kempe, A ^a   Heckl, W M ^a   Stark, R W ^a  

^a UNIVERSITY OF MUNICH   (Germany)

Author keywords

Actuators; Atomic force microscopy; Laser ablation; Lithography; Manipulators; Nanotechnology

Indexed keywords

ACTUATORS; ATOMIC FORCE MICROSCOPY; COMPUTER SOFTWARE; CROSSTALK; GRAPHICAL USER INTERFACES; HAPTIC INTERFACES; LASER ABLATION; NANOTECHNOLOGY; PHOTOLITHOGRAPHY;

BIOLOGICAL SYSTEMS; BOUNCING BEAM DETECTION METHOD; MECHANICAL LITHOGRAPHY; NANOMANIPULATION;

MANIPULATORS;

EID: 20344363191     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

1. G. Binnig, C.F. Quate, and C. Gerber, "Atomic force microscopy", Phys. Rev. Lett., vol. 56, no. 9, pp. 930-933, 1986.
2. S. Thalhammer, R.W. Stark, S. Müller, J. Wienberg, and W.M. Heckl, "The atomic force microscope as a new microdissecting tool for the generation of genetic probes" J. Struct. Biol., vol. 119, no. 2, pp. 232-237, 1997.
3. R.W. Stark, F.J. Rubio-Sierra, S. Thalhammer, and W.M. Heckl, "Combined nanomanipulation by atomic force microscopy and UV-laser ablation for chromosomal dissection" Europ. Biophys. J., vol. 32, no. 1, pp. 33-39, 2003.
4. M. Guthold et al., "Controlled manipulation of molecular samples with the nanoManipulator" IEEE/ASME Int. conf. advanced intelligent mechatronics, pp. 3-8, 1999.
5. st conf. Nanotechnology, vol. 1, pp. 75-80, 2001.
6. M. Sitti, and H. Hashimoto, "Controlled pushing of nanoparticles: modeling and experiments" IEEE/ASME Trans. on mechatronics, vol. 5, no. 2, pp. 199-211, 2000.
7. S. Thalhammer, R.W. Stark, K. Schütze, and W.M. Heckl, "Laser microdissection of metaphase chromosomes and characterization by atomic force microscopy" J. Bio. Optics, vol. 2, no. 1, pp.119, 1997.
8. F.J. Rubio-Sierra, R. Stark, S.Thalhammer, and W.M. Heckl, "Force-feedback joystick as a low-cost haptic interface for an atomic-force-microscopy nanomanipulator" Appl. Phys. A, vol. 76, no. 6, pp. 903-906, 2003.
9. Joonhyung Kwon et al, "Atomic force microscope with improved scan accuracy, scan speed, and optical vision" Rev. Sci. Instrum., vol. 74, no. 10, Oct. 2003