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Volumn 5550, Issue , 2004, Pages 299-312

Development, test and evaluation of MEMS micro-mirrors for free-space optical communications

Author keywords

Free space communications; MEMS mirror; Micromirror; MOEMS; Optical communications

Indexed keywords

FREE-SPACE COMMUNICATIONS; MEMS MIRRORS; MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS); MICROMIRRORS; MOEMS;

EID: 20144371212     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.562819     Document Type: Conference Paper
Times cited : (8)

References (4)
  • 2
    • 16544375380 scopus 로고    scopus 로고
    • Comparison of macro-tip/tilt and meso-scale position beam-steering transducers in cooperative target tracking for free-space optical communications
    • Proceedings of SPIE, Symposium on Optical Science and Technology, SPIE 48th Annual Meeting, 3-8 August, San Diego, CA
    • K.B. Fielhauer, E.G. Boone, J.R. Bruzzi, B.E. Kluga, J.R. Connelly, D.T. Winters, M.M. Bierbaum, J.J. Gorman, and N. Dagalakis, "Comparison of Macro-Tip/Tilt and Meso-Scale Position Beam-Steering Transducers in Cooperative Target Tracking for Free-Space Optical Communications," Proceedings of SPIE, Vol. 5160, Free-Space Laser Communications and Active Laser Illumination III, Symposium on Optical Science and Technology, SPIE 48th Annual Meeting, 3-8 August 2003, San Diego, CA
    • (2003) Free-space Laser Communications and Active Laser Illumination III , vol.5160
    • Fielhauer, K.B.1    Boone, E.G.2    Bruzzi, J.R.3    Kluga, B.E.4    Connelly, J.R.5    Winters, D.T.6    Bierbaum, M.M.7    Gorman, J.J.8    Dagalakis, N.9
  • 3
    • 0033693245 scopus 로고    scopus 로고
    • IC-compatible polysilicon surface micromachining
    • J. J. Sniegowski and M. P. de Boer, "IC-Compatible Polysilicon Surface Micromachining," Annu. Rev. Mater. Sci. 2000, 30:299-333.
    • (2000) Annu. Rev. Mater. Sci. , vol.30 , pp. 299-333
    • Sniegowski, J.J.1    De Boer, M.P.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.