Super-resolution optical mastering system using blue laser and high-numeric aperture lens

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5643, Issue , 2005, Pages 160-164

  Fan, Xiaodong ^a   Xu, Duanyi ^a   Qi, Guosheng ^a   Jiang, Peijun ^a   Qian, Kun ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

Mastering system; Phase shift mask; Super resolution

Indexed keywords

ELECTRON BEAM LITHOGRAPHY; LIGHT POLARIZATION; MASKS; OPTICAL COLLIMATORS; OPTICAL FILTERS; OPTICAL INSTRUMENT LENSES; OPTICAL RESOLVING POWER; PHASE SHIFT;

MASTERING SYSTEMS; PHASE-SHIFT MASK; SPACE FILTERS; SUPER-RESOLUTION;

LASER RECORDING;

EID: 20044396199     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.578181     Document Type: Conference Paper

References (4)

1. H. Ando, T. Yokota and K. Tanoue, "Optical Head with Annular Phase-shifting Apodizer," Jan. J. Appl. Phys. 32, 5269-5276 (1993).
2. H. Ando, "Phase-Shifting apodizer of Three or More Portions," Jan. J. Appl. Phys. 31, 557-567 (1992).
3. H. Wang, Z. Chen and F. Gan, "New approach to superresolution," Opt. Eng. 40, 851-855 (2001)
4. Xu Duanyi, "High density optical data storage," Tsinghua Univ. Pres. Beijing, (2003)