Maximising microcantilever response: An analytical approach using mathematical models

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5649, Issue PART 1, 2005, Pages 265-274

  Fernando, S N ^a   Chaffey, J P ^a  

^a RMIT UNIVERSITY   (Australia)

Author keywords

Mathematical model; Mechanical properties; MEMS; Silicon microcantilevers

Indexed keywords

CANTILEVER BEAMS; COMMINUTION; DEFLECTION (STRUCTURES); FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MECHANICAL PROPERTIES; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; SILICON;

MICROCANTILEVER BEAMS; MICROELECTROMECHANICAL SYSTEMS (MEMS); SENSING ELEMENTS; SILICON MICROCANTILEVERS;

SENSORS;

EID: 20044384742     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.582278     Document Type: Conference Paper

References (7)

1. Battiston, P.M., Ramseyer, J.P., et al., "A chemical sensor based on a microfabricated cantilever array with simultaneous resonance-frequency and bending readout", Sensors and Actuators, B: Chemical, 77(1-2): pp. 122-131, 2001.
2. Hansen, K.M., Ji, H.-F., et al., "Cantilever-Based Optical Deflection Assay for Discrimination of DNA Single-Nucleotide Mismatches." Anal. Chem., 73(7): pp. 1567-1571,2001.
3. Wu, G., Datar, R., et al., "Bioassay of prostrate-specific antigen (PSA) using microcantilevers", Nature Biotechnology, 19(9): pp. 856-860, 2001.
4. Headrick, J.J., Sepaniak, M.J., et al, "Enhancing chemi-mechanical transduction in microcantilever chemical sensing by surface modification", Ultramicroscopy, 97(1-4): pp. 417-424, 2003.
5. Beer, F.P. and Johnston, E.R., Mechanics of Materials. 2 ed. McGraw-Hill, London, 1992.
6. Hibbeler, R.C., Mechanics of Materials. 2 ed. Maxwell Macmillan International, New York, 1994.
7. Timoshenko, S., Vibration Problems in Engineering. 2 ed. D. Van Nostrand, New York,1937.