Increase of dynamic range of a Shack-Hartmann sensor by shifting detector plane

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5639, Issue , 2004, Pages 70-77

  Lee, Weon Woong ^a   Lee, Jun Ho ^b   Hwangbo, Chang Kwon ^b  

^a Inha University   (South Korea)

^b Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Dynamic range; Optical metrology; Shack Hartmann; Wavefront sensing

Indexed keywords

ABERRATIONS; COMPUTER SIMULATION; COMPUTER SOFTWARE; GEOMETRICAL OPTICS; LENSES; LIGHT MODULATORS; MIRRORS; SENSORS;

DYNAMIC RANGE; OPTICAL METROLOGY; SHACK HARTMANN WAVEFRONT SENSORS; WAVEFRONT SENSING;

ADAPTIVE OPTICS;

EID: 20044381889     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.571615     Document Type: Conference Paper

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