Sputtering of very thin palladium-alloy hydrogen separation membranes

Membrane Technology

Volumn 2005, Issue 5, 2005, Pages 7-9

  Klette, Hallgeir ^a   Bredesen, R ^a  

^a SINTEF MATERIALS AND CHEMISTRY   (Norway)

Author keywords

[No Author keywords available]

Indexed keywords

HYDROGEN; PALLADIUM ALLOYS; SEPARATION; SPUTTERING; SUBSTRATES; SURFACES;

HYDROGEN FLUX; THIN LAYERS;

MEMBRANES;

MEMBRANE;

EID: 20044365863     PISSN: 09582118     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0958-2118(05)70414-6     Document Type: Article

References (6)

1. R. Bredesen and H. Klette: Method of manufacturing thin metal membranes. US Patent 6086729, 11 July 2000.
2. Paglieri S.N. and Way J.D. Innovations in palladium membrane research Separation and Purification Methods 31 1 2002 1-169
3. H.R. Smith: Production of ductile foil. US Patent 3270381, 6 September 1965.
4. H.R. Smith: Apparatus for continuous foil production by vapor deposition. US Patent 3183563, 18 May 1965.
5. Mattox D.M. Handbook of physical vapor deposition (PVD) processing 1998 Noyes Publications, William Andrew Publishing NY, USA 588-635
6. Dittmeyer R. Hollein V. and Daub K. Membrane reactors for hydrogenation and dehydrogenation processes based on support ed palladium J. of Molecular Catalysis A: Chemical 173 September 2001 1-2