Formation of inorganic electride thin films via site-selective extrusion by energetic inert gas ions

Journal of Applied Physics

Volumn 97, Issue 2, 2005, Pages

  Miyakawa, Masashi ^a   Toda, Yoshitake ^a   Hayashi, Katsuro ^a   Hirano, Masahiro ^b   Kamiya, Toshio ^a   Matsunami, Noriaki ^c   Hosono, Hideo ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^b JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

^c NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLOGRAPHIC CAGES; ELECTRONIC CONDUCTIVE C12A7 FILMS; INERT GAS IONS; INORGANIC ELECTRIDE THIN FILMS;

CRYSTALLOGRAPHY; ELECTRIC CONDUCTIVITY; ELECTRIC FIELD EFFECTS; ELECTRIC POTENTIAL; EXTRUSION; INERT GASES; ION BOMBARDMENT; ION IMPLANTATION; POLYCRYSTALLINE MATERIALS; THERMAL DIFFUSION; THERMAL EFFECTS; ULTRAVIOLET RADIATION; X RAY DIFFRACTION ANALYSIS;

THIN FILMS;

EID: 19944430613     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1829151     Document Type: Article

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