Effects of residual stress on the thin-film elastic moduli calculated from surface acoustic wave spectroscopy experiments

Thin Solid Films

Volumn 484, Issue 1-2, 2005, Pages 251-256

  Kumon, R E ^a,b   Hurley, D C ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b UNIVERSITY OF WINDSOR   (Canada)

Author keywords

Acoustoelastic effect; Elastic properties; Residual stress; Surface acoustic waves; Titanium nitride

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; COMPRESSIVE STRESS; CRYSTAL LATTICES; CRYSTALLINE MATERIALS; ELASTIC MODULI; ELASTICITY; NEUTRON DIFFRACTION; RESIDUAL STRESSES; SINGLE CRYSTALS; TITANIUM NITRIDE;

ACOUSTIC WAVE DISPLACEMENT; ACOUSTOELASTIC EFFECTS; BULK MATERIALS; SURFACE ACOUSTIC WAVE MEASUREMENTS;

THIN FILMS;

EID: 19944412737     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.02.033     Document Type: Article

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