Modeling nanoporosity development in polymer films for low-k applications

Polymer Engineering and Science

Volumn 45, Issue 5, 2005, Pages 640-651

  Doshi, Prathamesh ^a   Simon, Sindee ^a  

^a Department of Electrical and Computer Engineering   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BUBBLES (IN FLUIDS); CARBON DIOXIDE; MASS TRANSFER; MATHEMATICAL MODELS; NANOSTRUCTURED MATERIALS; NUCLEATION; PARAMETER ESTIMATION; POROSITY; TEMPERATURE DISTRIBUTION; THICKNESS MEASUREMENT; THIN FILMS;

GROWTH DYNAMICS; MODELING; NANOPOROSITY; POLYMER FILMS;

POLYMERS;

EID: 19944411534     PISSN: 00323888     EISSN: None     Source Type: Journal    
DOI: 10.1002/pen.20317     Document Type: Article

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