Elimination of reference phase errors in phase-shifting interferometry

Measurement Science and Technology

Volumn 16, Issue 6, 2005, Pages 1335-1340

  Yongqian, Li ^a,b   Zhenyu, Zhu ^c   Xiaoying, Li ^a  

^a NORTHWESTERN POLYTECHNICAL UNIVERSITY   (China)

^b DALIAN UNIVERSITY OF TECHNOLOGY   (China)

^c The Greatwall Metrology Test Institute   (China)

Author keywords

Calibration; Error analysis; Error compensation algorithms; Laser interferometry; Phase stepping; Phase shifting interferometry

Indexed keywords

ALGORITHMS; COMPUTER SIMULATION; ERROR CORRECTION; INTERFEROMETERS; PHASE SHIFT;

PHASE ERRORS; PHASE EVALUATION ALGORITHMS; PHASE-SHIFTING INTERFEROMETRY (PSI); QUADRATIC REFERENCE PHASE DEVIATIONS;

INTERFEROMETRY;

INTERFEROMETRY;

EID: 19944395194     PISSN: 09570233     EISSN: 09570233     Source Type: Journal    
DOI: 10.1088/0957-0233/16/6/015     Document Type: Article

References (14)

1. Genovese K, Lamberti L and Pappalettere C 2004 A comprehensive ESPI based system for combined measurement of shape and deformation of electronic components Opt. Lasers Eng. 42 543-62
2. Karaalioglu C and Skarlatos Y 2004 Measurement of thin film thickness by electronic speckle pattern interferometry Opt. Commun. 234 269-76
3. Kim S W, Rhee H G and Chu J Y 2003 Volumetric phase-measuring interferometer for three-dimensional coordinate metrology Precision Eng. 27 205-15
4. Guo Z, Maruyama S and Komiya A 1999 Rapid yet accurate measurement of mass diffusion coefficients by phase shifting interferometer J. Phys. D: Appl. Phys. 32 995-9
5. Picart P 2001 Error analysis for a Mach-Zehnder type speckle interferometer Opt. Lasers Eng. 35 335-53
6. Schwider J, Dresel T and Manzke B 1999 Some considerations of reduction of reference phase error in phase stepping interferometry Appl. Opt. 38 655-9
7. Qian K, Shu F and Wu X 2000 Determination of the best phase step of the Carre algorithm in phase shifting interferometry Meas. Sci. Technol. 11 1220-3
8. Zhu Z 1998 The application of multi-wavelength phase shifting interference technology in precision measurement 1st Metrology&Test Center of the Commission of Science, Technology and Industry for National Defense (Beijing)
9. van Wingerden J, Frankena H J and Smorenburg C 1991 Linear approximation for measuremnet errors in phase shiftiong interferometry Appl. Opt. 30 2718-29
10. Brophy C P 1990 Effect of intensity error correlation on the computed phase of phase-shifting interferometry J. Opt. Soc. Am. A 7 537-41
11. Hibino K, Oreb B F, Farrant D I and Larkin K F 1997 Phase- shifting algorithms for nonlinear and spatially nonuniform phase shifts J. Opt. Soc. Am. A 14 918-30
12. Joenathan C 1994 Phase measuring interferometry: new methods and errors analysis Appl. Opt. 23 4147-55
13. Schödel R, Nicolaus A and Bönsch G 2002 Phase stepping interferometry: methods for reducing errors caused by camera nonlinearities Appl. Opt. 41 55-63
14. Pitas I 2000 Digital Image Processing Algorithms and Application (New York: Wiley)