Oxidation of tungsten surface with reactive oxygen plasma

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 232, Issue 1-4, 2005, Pages 358-361

  Romanyuk, Andriy ^a   Melnik, Viktor ^b   Oelhafen, Peter ^a  

^a UNIVERSITY OF BASEL   (Switzerland)

^b IHP   (Germany)

Author keywords

Oxygen plasma; ToF SIMS; Tungsten oxides; XPS

Indexed keywords

BINDING ENERGY; CONTAMINATION; HYDROGEN BONDS; MAGNETRON SPUTTERING; OXIDATION; PHOTOEMISSION; SECONDARY ION MASS SPECTROMETRY; STOICHIOMETRY; SURFACES; X RAY PHOTOELECTRON SPECTROSCOPY;

OXYGEN PLASMA; PHOTOEMISSION SPECTRA; TIME-OF-FLIGHT SECONDARY ION MASS SPECTROMETRY (TOF-SIMS); TUNGSTEN OXIDES;

TUNGSTEN COMPOUNDS;

EID: 19944372061     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2005.03.073     Document Type: Conference Paper

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