Infrared lensless holographic microscope with a vidicon camera for inspection of metallic evaporations on silicon wafers

Optics Communications

Volumn 251, Issue 1-3, 2005, Pages 44-50

  Repetto, L ^a   Chittofrati, R ^a   Piano, E ^a   Pontiggia, C ^a  

^a UNIVERSITY OF GENOA   (Italy)

Author keywords

Digital holography; High numerical aperture optical fiber; Infrared holography; Vidicon camera

Indexed keywords

CAMERAS; IMAGING TECHNIQUES; INFRARED DEVICES; INSPECTION; LENSES; METALLIC FILMS; SILICON WAFERS; VAPOR DEPOSITION;

DIGITAL HOLOGRAPHY; HIGH NUMERICAL APERTURE OPTICAL FIBER; INFRARED HOLOGRAPHY; VIDICON CAMERA;

HOLOGRAMS;

EID: 19844383760     PISSN: 00304018     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optcom.2005.02.061     Document Type: Article

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