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Physical Review B - Condensed Matter and Materials Physics

Volumn 70, Issue 11, 2004, Pages

Molecular dynamics simulations of a-SiC films

(4) Ivashchenko, V I a Turchi, P E A b Shevchenko, V I a Shramko, O A a

a FRANTSEVICH INSTITUTE FOR PROBLEMS OF MATERIALS SCIENCE (Ukraine)

b LAWRENCE LIVERMORE NATIONAL LABORATORY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

SILICON CARBIDE;

ARTICLE; FILM; FORCE; KINETICS; MOLECULAR DYNAMICS; POLYMERIZATION; SIMULATION; STRUCTURE ANALYSIS; TEMPERATURE; VAPOR;

EID: 19744381191 PISSN: 01631829 EISSN: None Source Type: Journal
DOI: 10.1103/PhysRevB.70.115201 Document Type: Article

Times cited : (26)

References (63)

1
- 0023439420
- J. Bullot and M. P. Schmidt, Phys. Status Solidi B 143, 345 (1987).
- (1987) Phys. Status Solidi B , vol.143 , pp. 345
- Bullot, J.¹ Schmidt, M.P.²

2
- 9744258247
- Proc. E-MRS, edited by L. Calcagno, A. Hallen, R. Martins, and W. Skorupa (Elsevier, Amsterdam)
- Amorphous and Crystalline Silicon Carbide: Materials and Applications, Proc. E-MRS, edited by L. Calcagno, A. Hallen, R. Martins, and W. Skorupa (Elsevier, Amsterdam, 2001).
- (2001) Amorphous and Crystalline Silicon Carbide: Materials and Applications

3
- 0001924925
- D. Kruangam, T. Endo, M. Deguchi, W. Guang-Pu, H. Okamoto, and Y. Hamakawa, Opto-electronics (London) 1, 67 (1986).
- (1986) Opto-electronics (London) , vol.1 , pp. 67
- Kruangam, D.¹ Endo, T.² Deguchi, M.³ Guang-Pu, W.⁴ Okamoto, H.⁵ Hamakawa, Y.⁶

4
- 0032157721
- Y. Hamakawa, Renewable Energy 15, 22 (1998).
- (1998) Renewable Energy , vol.15 , pp. 22
- Hamakawa, Y.¹

5
- 0031166706
- A. Desalvo, F. Giorgis, C. F. Pirri, E. Tresso, P. Rava, A. Galloni, R. Rizolli, and C. Summonte, J. Appl. Phys. 81, 7973 (1997).
- (1997) J. Appl. Phys. , vol.81 , pp. 7973
- Desalvo, A.¹ Giorgis, F.² Pirri, C.F.³ Tresso, E.⁴ Rava, P.⁵ Galloni, A.⁶ Rizolli, R.⁷ Summonte, C.⁸

6
- 0037416764
- G. Ambrosone, V. Ballarini, U. Coscia, S. Ferrero, F. Giorgis, P. Maddalena, A. Patelli, P. Rava, and V. Rigato, Thin Solid Films 427, 279 (2003).
- (2003) Thin Solid Films , vol.427 , pp. 279
- Ambrosone, G.¹ Ballarini, V.² Coscia, U.³ Ferrero, S.⁴ Giorgis, F.⁵ Maddalena, P.⁶ Patelli, A.⁷ Rava, P.⁸ Rigato, V.⁹

7
- 27544493510
- J.-H. Park, H.-S. Kwon, and J.-Y. Lee, J. Appl. Phys. 72, 5246 (1992).
- (1992) J. Appl. Phys. , vol.72 , pp. 5246
- Park, J.-H.¹ Kwon, H.-S.² Lee, J.-Y.³

8
- 0006198453
- M. M. Rahman, C. Y. Yang, D. Sugiarto, A. S. Byrne, M. Ju, K. Tran, K. H. Lui, T. Asano, and W. F. Stickle, J. Appl. Phys. 67, 7065 (1990).
- (1990) J. Appl. Phys. , vol.67 , pp. 7065
- Rahman, M.M.¹ Yang, C.Y.² Sugiarto, D.³ Byrne, A.S.⁴ Ju, M.⁵ Tran, K.⁶ Lui, K.H.⁷ Asano, T.⁸ Stickle, W.F.⁹

9
- 0028447844
- S. Ghosh, A. De, and S. Ray, Thin Solid Films 245, 249 (1994).
- (1994) Thin Solid Films , vol.245 , pp. 249
- Ghosh, S.¹ De, A.² Ray, S.³

10
- 0028320386
- M. E. El Khakani, M. Chaker, A. Jean, S. Boily, J. C. Kieffer, M. E. O'Hern, M. F. Ravet, and F. Rousseaux, J. Mater. Res. 9, 96 (1994).
- (1994) J. Mater. Res. , vol.9 , pp. 96
- El Khakani, M.E.¹ Chaker, M.² Jean, A.³ Boily, S.⁴ Kieffer, J.C.⁵ O'Hern, M.E.⁶ Ravet, M.F.⁷ Rousseaux, F.⁸

11
- 0000424721
- M. A. El Khakani, M. Chaker, M. E. O'Hern, and W. C. Oliver, J. Appl. Phys. 82, 4310 (1997).
- (1997) J. Appl. Phys. , vol.82 , pp. 4310
- El Khakani, M.A.¹ Chaker, M.² O'Hern, M.E.³ Oliver, W.C.⁴

12
- 0031078638
- B. Cros, E. Gat, and J. M. Saurel, J. Non-Cryst. Solids 209, 273 (1997).
- (1997) J. Non-Cryst. Solids , vol.209 , pp. 273
- Cros, B.¹ Gat, E.² Saurel, J.M.³

13
- 0035269355
- J. Esteve, A. Lousa, E. Martinez, H. Huck, E. B. Halac, and M. Reinoso, Diamond Relat. Mater. 10, 1053 (2001).
- (2001) Diamond Relat. Mater. , vol.10 , pp. 1053
- Esteve, J.¹ Lousa, A.² Martinez, E.³ Huck, H.⁴ Halac, E.B.⁵ Reinoso, M.⁶

14
- 36449009128
- W. K. Choi, F. L. Loo, C. H. Ling, F. C. Loh, and K. L. Tan, J. Appl. Phys. 78, 7289 (1995).
- (1995) J. Appl. Phys. , vol.78 , pp. 7289
- Choi, W.K.¹ Loo, F.L.² Ling, C.H.³ Loh, F.C.⁴ Tan, K.L.⁵

15
- 21844521171
- H. Kung, T. R. Jervis, J. P. Hirvonen, J. D. Embury, T. E. Mitchell, and M. Nastasi, Philos. Mag. A 71, 759 (1995).
- (1995) Philos. Mag. A , vol.71 , pp. 759
- Kung, H.¹ Jervis, T.R.² Hirvonen, J.P.³ Embury, J.D.⁴ Mitchell, T.E.⁵ Nastasi, M.⁶

16
- 0000723671
- M. Tabbal, S. Isber, T. C. Christidis, M. A. El Khakani, and M. Chaker, J. Appl. Phys. 88, 5127 (2000).
- (2000) J. Appl. Phys. , vol.88 , pp. 5127
- Tabbal, M.¹ Isber, S.² Christidis, T.C.³ El Khakani, M.A.⁴ Chaker, M.⁵

17
- 0035852166
- T. Christidis, M. Tabbal, S. Isber, M. A. El Khakani, and M. Chaker, Appl. Surf. Sci. 184, 268 (2001).
- (2001) Appl. Surf. Sci. , vol.184 , pp. 268
- Christidis, T.¹ Tabbal, M.² Isber, S.³ El Khakani, M.A.⁴ Chaker, M.⁵

18
- 0000628971
- S. Ghosh, P. Bhattacharya, and D. N. Bose, Appl. Phys. Lett. 68, 2979 (1996).
- (1996) Appl. Phys. Lett. , vol.68 , pp. 2979
- Ghosh, S.¹ Bhattacharya, P.² Bose, D.N.³

19
- 4043178681
- M. Ishumaru, In-Tae Bae, Y. Hirotsu, S. Matsumura, and K. Sickafus, Phys. Rev. Lett. 89, 055502 (2002).
- (2002) Phys. Rev. Lett. , vol.89 , pp. 055502
- Ishumaru, M.¹ Bae, I.-T.² Hirotsu, Y.³ Matsumura, S.⁴ Sickafus, K.⁵

20
- 0037390709
- S. Muto and T. Tanabe, J. Appl. Phys. 93, 3765 (2003).
- (2003) J. Appl. Phys. , vol.93 , pp. 3765
- Muto, S.¹ Tanabe, T.²

21
- 0001011987
- F. Finocchi, G. Galli, M. Parrinello, and C. M. Bertoni, Phys. Rev. Lett. 68, 3044 (1992).
- (1992) Phys. Rev. Lett. , vol.68 , pp. 3044
- Finocchi, F.¹ Galli, G.² Parrinello, M.³ Bertoni, C.M.⁴

22
- 0027656889
- P. C. Kelires and P. J. H. Denteneer, Solid State Commun. 87, 851 (1993).
- (1993) Solid State Commun. , vol.87 , pp. 851
- Kelires, P.C.¹ Denteneer, P.J.H.²

23
- 0037113559
- V. I. Ivashchenko, P. E. A. Turchi, V. I. Shevchenko, L. A. Ivashchenko, and G. V. Rusakov, Phys. Rev. B 66, 195201 (2002).
- (2002) Phys. Rev. B , vol.66 , pp. 195201
- Ivashchenko, V.I.¹ Turchi, P.E.A.² Shevchenko, V.I.³ Ivashchenko, L.A.⁴ Rusakov, G.V.⁵

24
- 0038522671
- V. I. Ivashchenko, P. E. A. Turchi, V. I. Shevchenko, L. A. Ivashchenko, and G. V. Rusakov, Diamond Relat. Mater. 12, 993 (2003).
- (2003) Diamond Relat. Mater. , vol.12 , pp. 993
- Ivashchenko, V.I.¹ Turchi, P.E.A.² Shevchenko, V.I.³ Ivashchenko, L.A.⁴ Rusakov, G.V.⁵

25
- 84956260521
- P. C. Kelires, Europhys. Lett. 14, 43 (1991).
- (1991) Europhys. Lett. , vol.14 , pp. 43
- Kelires, P.C.¹

26
- 0000327022
- P. C. Kelires, Phys. Rev. B 46, 10 048 (1992).
- (1992) Phys. Rev. B , vol.46
- Kelires, P.C.¹

27
- 4243535075
- J. Tersoff, Phys. Rev. B 49, 16 349 (1994).
- (1994) Phys. Rev. B , vol.49
- Tersoff, J.¹

28
- 0036500802
- C. R. S. da Silva, J. F. Justo, and A. Fazzio, Phys. Rev. B 65, 104108 (2002).
- (2002) Phys. Rev. B , vol.65 , pp. 104108
- Da Silva, C.R.S.¹ Justo, J.F.² Fazzio, A.³

29
- 0001335963
- D. Mura, L. Colombo, R. Bertoncini, and G. Mula, Phys. Rev. B 58, 10 357 (1998).
- (1998) Phys. Rev. B , vol.58
- Mura, D.¹ Colombo, L.² Bertoncini, R.³ Mula, G.⁴

30
- 0035852168
- V. I. Ivashchenko and V. I. Shevchenko, Appl. Surf. Sci. 184, 137 (2001).
- (2001) Appl. Surf. Sci. , vol.184 , pp. 137
- Ivashchenko, V.I.¹ Shevchenko, V.I.²

31
- 0037017533
- V. I. Ivashchenko, V. I. Shevchenko, G. V. Rusakov, A. S. Klymenko, V. M. Popov, L. A. Ivashchenko, and E. I. Bogdanov, J. Phys.: Condens. Matter 14, 1799 (2002).
- (2002) J. Phys.: Condens. Matter , vol.14 , pp. 1799
- Ivashchenko, V.I.¹ Shevchenko, V.I.² Rusakov, G.V.³ Klymenko, A.S.⁴ Popov, V.M.⁵ Ivashchenko, L.A.⁶ Bogdanov, E.I.⁷

32
- 0001401286
- F. Finocchi and G. Galli, Phys. Rev. B 50, 7393 (1994).
- (1994) Phys. Rev. B , vol.50 , pp. 7393
- Finocchi, F.¹ Galli, G.²

33
- 0038573973
- V. I. Ivashchenko, P. E. A. Turchi, V. I. Shevchenko, L. A. Ivashchenko, and G. V. Rusakov, J. Phys.: Condens. Matter 15, 4119 (2003).
- (2003) J. Phys.: Condens. Matter , vol.15 , pp. 4119
- Ivashchenko, V.I.¹ Turchi, P.E.A.² Shevchenko, V.I.³ Ivashchenko, L.A.⁴ Rusakov, G.V.⁵

34
- 0035134557
- F. Gao and W. J. Weber, Phys. Rev. B 63, 054101 (2000).
- (2000) Phys. Rev. B , vol.63 , pp. 054101
- Gao, F.¹ Weber, W.J.²

35
- 0035871266
- F. Gao and W. J. Weber, J. Appl. Phys. 89, 4275 (2001).
- (2001) J. Appl. Phys. , vol.89 , pp. 4275
- Gao, F.¹ Weber, W.J.²

36
- 0034907639
- F. Gao, W. J. Weber, and W. Jiang, Phys. Rev. B 63, 214106 (2001).
- (2001) Phys. Rev. B , vol.63 , pp. 214106
- Gao, F.¹ Weber, W.J.² Jiang, W.³

37
- 0032592095
- J. M. Perlado, L. Malerba, and T. Diaz de la Rubia, Mater. Res. Soc. Symp. Proc. 540, 171 (1999).
- (1999) Mater. Res. Soc. Symp. Proc. , vol.540 , pp. 171
- Perlado, J.M.¹ Malerba, L.² Diaz De La Rubia, T.³

38
- 36749107785
- H. C. Andersen, J. Phys. Chem. 72, 2384 (1980).
- (1980) J. Phys. Chem. , vol.72 , pp. 2384
- Andersen, H.C.¹

39
- 0000050124
- P. Kelires, Phys. Rev. Lett. 73, 2460 (1994).
- (1994) Phys. Rev. Lett. , vol.73 , pp. 2460
- Kelires, P.¹

40
- 0001010801
- R. Haerle, A. Baldereschi, and G. Galli, J. Non-Cryst. Solids 266-269, 740 (2000).
- (2000) J. Non-Cryst. Solids , vol.266-269 , pp. 740
- Haerle, R.¹ Baldereschi, A.² Galli, G.³

41
- 0020545505
- P. Vogl, H. P. Hjalmarson, and J. D. Dow, J. Phys. Chem. Solids 44, 365 (1983).
- (1983) J. Phys. Chem. Solids , vol.44 , pp. 365
- Vogl, P.¹ Hjalmarson, H.P.² Dow, J.D.³

42
- 0001343569
- R. Haydock, V. Heine, and M. J. Kelly, J. Phys. C 5, 2845 (1972).
- (1972) J. Phys. C , vol.5 , pp. 2845
- Haydock, R.¹ Heine, V.² Kelly, M.J.³

43
- 0000296022
- C. M. M. Nex, Comput. Phys. Commun. 34, 101 (1984).
- (1984) Comput. Phys. Commun. , vol.34 , pp. 101
- Nex, C.M.M.¹

44
- 0000447763
- J. Robertson, Philos. Mag. B 66, 615 (1992).
- (1992) Philos. Mag. B , vol.66 , pp. 615
- Robertson, J.¹

45
- 0003464333
- Freeman, San Fransisco
- W. A. Harrison, Electronic Properties of Solids (Freeman, San Fransisco, 1980).
- (1980) Electronic Properties of Solids
- Harrison, W.A.¹

46
- 0001201869
- P. A. Fedders and D. A. Drabold, Phys. Rev. B 47, 13 277 (1993).
- (1993) Phys. Rev. B , vol.47
- Fedders, P.A.¹ Drabold, D.A.²

47
- 0343229447
- edited by G. L. Harris and C. Y. Yang (Springer Verlag, New York)
- Amorphous and Crystalline Silicon Carbide and Related Materials, edited by G. L. Harris and C. Y. Yang (Springer Verlag, New York, 1989).
- (1989) Amorphous and Crystalline Silicon Carbide and Related Materials

48
- 0037416653
- I. Ferreira, E. Fortunato, and R. Martins, Thin Solid Films 427, 231 (2003).
- (2003) Thin Solid Films , vol.427 , pp. 231
- Ferreira, I.¹ Fortunato, E.² Martins, R.³

49
- 1842715064
- O. K. Porada, V. I. Ivashchenko, L. A. Ivashchenko, G. V. Rusakov, and S. M. Dub, Surf. Coat. Technol. 180-181, 122 (2004).
- (2004) Surf. Coat. Technol. , vol.180-181 , pp. 122
- Porada, O.K.¹ Ivashchenko, V.I.² Ivashchenko, L.A.³ Rusakov, G.V.⁴ Dub, S.M.⁵

50
- 0035852202
- L. Calcagno, P. Musumeci, F. Roccaforte, C. Bongiorno, and G. Foti, Appl. Surf. Sci. 184, 123 (2001).
- (2001) Appl. Surf. Sci. , vol.184 , pp. 123
- Calcagno, L.¹ Musumeci, P.² Roccaforte, F.³ Bongiorno, C.⁴ Foti, G.⁵

51
- 9744248900
- L. Calcagno, P. Musumeci, R. Roccaforte, C. Bongiorno, and G. Foti, Thin Solid Films 431, 298 (2002).
- (2002) Thin Solid Films , vol.431 , pp. 298
- Calcagno, L.¹ Musumeci, P.² Roccaforte, R.³ Bongiorno, C.⁴ Foti, G.⁵

52
- 0001564044
- M. B. Yu, Rusli, S. F. Yoon, Z. M. Chen, J. Ahn, Q. Zhang, K. Chew, and J. Cui, J. Appl. Phys. 87, 8155 (2000).
- (2000) J. Appl. Phys. , vol.87 , pp. 8155
- Yu, M.B.¹ Rusli² Yoon, S.F.³ Chen, Z.M.⁴ Ahn, J.⁵ Zhang, Q.⁶ Chew, K.⁷ Cui, J.⁸

53
- 0003550204
- F. Demichelis, C. F. Pirri, and E. Tresso, Philos. Mag. B 66, 135 (1992).
- (1992) Philos. Mag. B , vol.66 , pp. 135
- Demichelis, F.¹ Pirri, C.F.² Tresso, E.³

54
- 0001460323
- Y. Matsumoto, G. Hirata, H. Takakura, H. Okamoto, and Y. Hamakawa, J. Appl. Phys. 67, 6538 (1990).
- (1990) J. Appl. Phys. , vol.67 , pp. 6538
- Matsumoto, Y.¹ Hirata, G.² Takakura, H.³ Okamoto, H.⁴ Hamakawa, Y.⁵

55
- 0347182000
- S. J. Toal, H. S. Reehal, N. P. Barradas, and C. Jeynes, Appl. Surf. Sci. 138-139, 424 (1999).
- (1999) Appl. Surf. Sci. , vol.138-139 , pp. 424
- Toal, S.J.¹ Reehal, H.S.² Barradas, N.P.³ Jeynes, C.⁴

56
- 0032157110
- W. K. Choi, T. Y. Ong, L. J. Han, F. C. Loh, and K. L. Tan, Phys. Status Solidi A 169, 67 (1998).
- (1998) Phys. Status Solidi A , vol.169 , pp. 67
- Choi, W.K.¹ Ong, T.Y.² Han, L.J.³ Loh, F.C.⁴ Tan, K.L.⁵

57
- 0041924276
- A. Hofgen, V. Heera, F. Eichhorn, and W. Skorupa, J. Appl. Phys. 84, 4769 (1998).
- (1998) J. Appl. Phys. , vol.84 , pp. 4769
- Hofgen, A.¹ Heera, V.² Eichhorn, F.³ Skorupa, W.⁴

58
- 0000559467
- V. Heera, F. Prokert, N. Schell, H. Seifarth, W. Fukarek, M. Voelskow, and W. Skorupa, Appl. Phys. Lett. 70, 3531 (1997).
- (1997) Appl. Phys. Lett. , vol.70 , pp. 3531
- Heera, V.¹ Prokert, F.² Schell, N.³ Seifarth, H.⁴ Fukarek, W.⁵ Voelskow, M.⁶ Skorupa, W.⁷

59
- 4143050232
- W. Bolse, J. Conrad, F. Harbsmeier, M. Borowski, and T. Rodle, Mater. Res. Soc. Symp. Proc. 248-249, 319 (1997).
- (1997) Mater. Res. Soc. Symp. Proc. , vol.248-249 , pp. 319
- Bolse, W.¹ Conrad, J.² Harbsmeier, F.³ Borowski, M.⁴ Rodle, T.⁵

60
- 0035980386
- U. Schmid, M. Eickhoff, Ch. Richter, G. Krotz, and D. Schmitt-Landsiedel, Sens. Actuators, A 94, 87 (2001).
- (2001) Sens. Actuators, A , vol.94 , pp. 87
- Schmid, U.¹ Eickhoff, M.² Richter, Ch.³ Krotz, G.⁴ Schmitt-Landsiedel, D.⁵

61
- 0000516862
- M. A. El Khakani, M. Chaker, A. Jean, S. Boily, H. Pepin, J. C. Kieffer, and S. C. Gujrathi, J. Appl. Phys. 74, 2834 (1993).
- (1993) J. Appl. Phys. , vol.74 , pp. 2834
- El Khakani, M.A.¹ Chaker, M.² Jean, A.³ Boily, S.⁴ Pepin, H.⁵ Kieffer, J.C.⁶ Gujrathi, S.C.⁷

62
- 0032620185
- C. Long, S. A. Ustin, and W. Ho, J. Appl. Phys. 86, 2509 (1999).
- (1999) J. Appl. Phys. , vol.86 , pp. 2509
- Long, C.¹ Ustin, S.A.² Ho, W.³

63
- 0035883541
- G. Hadjisavvas, G. Kopidakis, and P. C. Kelires, Phys. Rev. B 64, 125413 (2001).
- (2001) Phys. Rev. B , vol.64 , pp. 125413
- Hadjisavvas, G.¹ Kopidakis, G.² Kelires, P.C.³

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