Indium sesquitelluride (In2Te3) thin film strain gauge

Sensors and Actuators, A: Physical

Volumn 121, Issue 2, 2005, Pages 405-409

  Desai, R R ^a   Lakshminarayana, D ^a   Patel, P B ^a   Panchal, C J ^b  

^a SARDAR PATEL UNIVERSITY   (India)

^b M S UNIVERSITY OF BARODA   (India)

Author keywords

Flash evaporation; Indium sesquitelluride; Thin film strain gauge

Indexed keywords

CRYSTALLINE MATERIALS; EVAPORATION; FLOW MEASUREMENT; SEMICONDUCTOR MATERIALS; SENSITIVITY ANALYSIS; STRAIN GAGES; TEMPERATURE MEASUREMENT; THIN FILMS;

CANTILEVER TECHNIQUES; FLASH EVAPORATION; INDIUM SESQUITELLURIDE; THIN FILM STRAIN GAUGE;

INDIUM COMPOUNDS;

EID: 19744375353     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.03.011     Document Type: Article

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