Behaviour of a planar Langmuir probe in a laser ablation plasma

Applied Surface Science

Volumn 247, Issue 1-4, 2005, Pages 134-138

  Doggett, B ^a   Budtz Joergensen, C ^a   Lunney, J G ^a   Sheerin, P ^b   Turner, M M ^b  

^a TRINITY COLLEGE DUBLIN   (Ireland)

^b DUBLIN CITY UNIVERSITY   (Ireland)

Author keywords

Excimer laser; Laser ablation plasma; Plasma immersion ion implantation

Indexed keywords

EXCIMER LASERS; ION IMPLANTATION; MATHEMATICAL MODELS; PLASMA FLOW; PROBES; VACUUM;

LASER ABLATION PLASMAS; LOW TEMPERATURE PLASMAS; PLANAR LANGMUIR PROBES; PLASMA IMMERSION ION IMPLANTATION;

LASER ABLATION;

EID: 19744372716     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2005.01.035     Document Type: Article

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