SCOPUS 정보 검색 플랫폼

Volumn , Issue , 2002, Pages 267-268

Sub-micrometer pulsetrain machining of diamond-like amorphous carbon films with a femtosecond pulse Ti:sapphire laser oscillator

(5) Lako S a Apai, P a Pocsik I a Szipocs R a Wintner, E b

a Research Institute of Solid State Physics and Optics (Hungary)

b VIENNA UNIVERSITY OF TECHNOLOGY (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; AMORPHOUS SILICON; CARBON FILMS; COATINGS; ELECTROMAGNETIC PULSE; SAPPHIRE; SILICON WAFERS;

AMORPHOUS CARBON COATING; AMORPHOUS CARBON FILMS; DAMAGED AREA; DIAMOND-LIKE; LASER OSCILLATORS; METALLIC COATING; PULSE TRAIN; SI WAFER; SUBMICROMETERS; TI: SAPPHIRE LASER;

AMORPHOUS CARBON;

EID: 19744366111 PISSN: None EISSN: 21622701 Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper

Times cited : (1)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.