H2S microgas sensor fabricated by thermal oxidation of Cu/Sn double layer

Sensors and Actuators, B: Chemical

Volumn 108, Issue 1-2 SPEC. ISS., 2005, Pages 84-88

  Lee, Jeong Min ^a   Moon, Byeong Ui ^a   Shim, Chang Hyun ^b   Kim, Bong Chull ^c   Lee, Myeoung Bok ^a   Lee, Duk Dong ^a   Lee, Jong Ho ^a  

^a Kyungpook National University   (South Korea)

^b Sense and Sensor Co Ltd   (South Korea)

^c NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

CuO SnO2; Microgas sensor; Thermal oxidation

Indexed keywords

CHEMICAL SENSORS; COMPOSITE MATERIALS; CRYSTAL ORIENTATION; FABRICATION; HYDROGEN SULFIDE; MICROSTRUCTURE; OXIDATION; THERMAL EFFECTS; THIN FILMS; TIN;

CUO-SNO2; MICROGAS SENSOR; THERMAL EVAPORATION; THERMAL OXIDATION;

COPPER;

EID: 19744363425     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2005.01.037     Document Type: Conference Paper

References (12)

1. S. Yamauchi Chemcial Sensor Technology vol. 4 1992 Kodansha Tokyo
2. 2:CuO composite thin film sensors prepared by thermal evaporation Sens. Actuators B 96 2003 245 252
3. 2 thin film prepared by low-pressure evaporation method Sens. Actuators B 49 1998 121 125
4. 2S Sens. Actuators B 79 2001 187 191
5. 2 Sens. Actuators B 93 2003 572 579
6. 2-based thin films Sens. Actuators B 65 2000 111 113
7. R.S. Niranjan, V.A. Chaudhary, I.S. Mulla, and K. Vijayamohanan A novel hydrogen sulfide room temperature sensor based on copper nanocluster functionalized tin oxide thin films Sens. Actuators B 85 2002 26 32
8. 2S-sensitive copper-doped tin oxide thin film Mater. Chem. Phys. 80 2003 250 256
9. 2 thin film fabricated by thermal oxidation of a Sn/Pt double layer Sens. Actuators B 81 2002 176 181
10. B.D. Cullity Elements X-ray Diffraction 2th ed. 1978 Addison-Wesley London
11. 2 gas sensors Sens. Actuators B 89 2003 158 163
12. B.-U. Moon, J.-M. Lee, C.-H. Shim, M.-B. Lee, J.-H. Lee, D.-D. Lee, and J.-H. Lee Silicon bridge type micro gas sensor array for low power consumption Proceedings of the 10th International Meeting of Chemical Sensors, vol. 1A11 July 11-14, Tsukuba, Japan 2004