메뉴 건너뛰기




Volumn 14, Issue 6, 2005, Pages 1125-1129

Total cross sections for electron scattering at 10-5000 eV by polyatomic molecules CF4, CF3H, C2F4, C 2F6 and C2H3F3

Author keywords

Additivity rule; Complex optical potential; Total cross section

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ELECTRON ENERGY LEVELS; HALOGENATION; HYDROCARBONS; NUMERICAL ANALYSIS; PLASMA ETCHING; PROBLEM SOLVING;

EID: 19544363605     PISSN: 10091963     EISSN: None     Source Type: Journal    
DOI: 10.1088/1009-1963/14/6/012     Document Type: Article
Times cited : (10)

References (23)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.