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Volumn 14, Issue 6, 2005, Pages 1125-1129
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Total cross sections for electron scattering at 10-5000 eV by polyatomic molecules CF4, CF3H, C2F4, C 2F6 and C2H3F3
a a,b a a,c |
Author keywords
Additivity rule; Complex optical potential; Total cross section
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Indexed keywords
CHEMICAL VAPOR DEPOSITION;
ELECTRON ENERGY LEVELS;
HALOGENATION;
HYDROCARBONS;
NUMERICAL ANALYSIS;
PLASMA ETCHING;
PROBLEM SOLVING;
ADDITIVITY RULE;
COMPLEX OPTICAL POTENTIAL;
POLYATOMIC MOLECULES;
TOTAL CROSS SECTION;
ELECTRON SCATTERING;
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EID: 19544363605
PISSN: 10091963
EISSN: None
Source Type: Journal
DOI: 10.1088/1009-1963/14/6/012 Document Type: Article |
Times cited : (10)
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References (23)
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