An influence of polyHEMA gate layer on properties of ChemFETs

Sensors

Volumn 3, Issue 6, 2003, Pages 146-159

  Dawgul, Marek ^a   Pijanowska, Dorota G ^a   Krzyskow, Alfred ^a   Kruk, Jerzy ^a   Torbicz, Wladyslaw ^a  

^a INSTITUTE OF BIOCYBERNETICS AND BIOMEDICAL ENGINEERING   (Poland)

Author keywords

Hydrogel buffering layer; Ion sensitive field effect transistor(ISFET); Photolithography; Poly(2 hydroxyethyl methacrylate)

Indexed keywords

ACRYLICS; CHEMICAL MODIFICATION; HYDROGELS; ION SENSITIVE FIELD EFFECT TRANSISTORS; PHOTOLITHOGRAPHY; SILICON NITRIDE; SILICON WAFERS;

HYDROGEL BUFFERING LAYERS; ION SELECTIVE SENSORS; POLY(2-HYDROXYETHYL METHACRYLATE); SEMICONDUCTOR BASED SENSORS;

PH SENSORS;

EID: 1942512846     PISSN: 14243210     EISSN: None     Source Type: Journal    
DOI: 10.3390/s30600146     Document Type: Article

References (9)

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