A Megapixel HgCdTe MWIR Focal plane array with a 15 um pitch

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5251, Issue , 2004, Pages 65-72

  Castelein, Pierre ^a   Marion, Francois ^a   Martin, Jean Luc ^a   Baylet, Jacques ^a   Moussy, Norbert ^a   Gravrand, Olivier ^a   Durand, Alain ^a   Chamonal, Jean Paul ^a   Destefanis, Gérard ^a  

^a CEA LETI   (France)

Author keywords

15 um pitch; Focal plane array; HgCdTe; IRCMOS; MBE; Mega pixel; MWIR; Third generation

Indexed keywords

CMOS INTEGRATED CIRCUITS; CONSTRAINT THEORY; ELECTROOPTICAL EFFECTS; FLIP CHIP DEVICES; MERCURY COMPOUNDS; OPTICAL RESOLVING POWER; PHOTOLITHOGRAPHY; RELIABILITY; SILICON WAFERS; SINGLE CRYSTALS; THERMAL CYCLING;

15 UM PITCH; FOCAL PLANE ARRAYS; HGCDTE; IRCMOS; MEGA-PIXEL; MWIR; THIRD GENERATION;

INFRARED DETECTORS;

EID: 1942456626     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.515419     Document Type: Conference Paper

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