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Volumn 5250, Issue , 2004, Pages 400-405

Monitoring the last two (AR) layers in narrow bandpass filters

Author keywords

Error correction; Film thickness monitors; Monitoring; Narrow band filter coatings

Indexed keywords

FILM THICKNESS MONITORS; NARROW BAND FILTER COATINGS;

EID: 1942425593     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.510715     Document Type: Conference Paper
Times cited : (1)

References (7)
  • 1
    • 0242290816 scopus 로고    scopus 로고
    • Search for the Cause of Asymmetric Results of Monitoring Errors in DWDM Filters and the Benefits of Corrections in the Last Two Layers
    • TBD
    • R. R. Willey, "Search for the Cause of Asymmetric Results of Monitoring Errors in DWDM Filters and the Benefits of Corrections in the Last Two Layers,"," Proc. Soc. Vac. Coaters 46, TBD, 2003.
    • (2003) Proc. Soc. Vac. Coaters , vol.46
    • Willey, R.R.1
  • 2
    • 0035505459 scopus 로고    scopus 로고
    • Achieving Narrow Bandpass Filters Which Meet the Performance Required for DWDM
    • R. R. Willey, "Achieving Narrow Bandpass Filters Which Meet the Performance Required for DWDM," Thin Solid Films, 398-399, 1, 2001.
    • (2001) Thin Solid Films , vol.398-399 , pp. 1
    • Willey, R.R.1
  • 3
    • 0036603099 scopus 로고    scopus 로고
    • Simulation of errors in monitoring narrow bandpass filters
    • R. R. Willey, "Simulation of errors in monitoring narrow bandpass filters," Appl. Opt. 41, 3193-3195, 2002.
    • (2002) Appl. Opt. , vol.41 , pp. 3193-3195
    • Willey, R.R.1
  • 4
    • 0035214622 scopus 로고    scopus 로고
    • Estimating the Properties of DWDM Filters Before Designing and Their Error Sensitivity and Compensation Effects in Production
    • R. R. Willey, "Estimating the Properties of DWDM Filters Before Designing and Their Error Sensitivity and Compensation Effects in Production," Proc. Soc. Vac. Coaters 44, 262, 2001.
    • (2001) Proc. Soc. Vac. Coaters , vol.44 , pp. 262
    • Willey, R.R.1
  • 5
    • 1942433654 scopus 로고    scopus 로고
    • Application of a refined error model of turning point monitoring to the simulation of narrow bandpass filter production
    • R. R. Willey, "Application of a refined error model of turning point monitoring to the simulation of narrow bandpass filter production,"," Proc. Soc. Vac. Coaters 45, 295, 2002.
    • (2002) Proc. Soc. Vac. Coaters , vol.45 , pp. 295
    • Willey, R.R.1
  • 6
    • 0003840270 scopus 로고    scopus 로고
    • and following (Marcel Dekker, Inc.)
    • nd Ed., page 8 and following (Marcel Dekker, Inc., 2002).
    • (2002) nd Ed. , pp. 8
    • Willey, R.R.1
  • 7
    • 0242304498 scopus 로고    scopus 로고
    • FTG Software Associates, P. O. Box 579, Princeton, NJ 08542
    • FilmStar Design Program, FTG Software Associates, P. O. Box 579, Princeton, NJ 08542
    • FilmStar Design Program


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.