High precision longpass filter arrays for miniature spectrometers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5250, Issue , 2004, Pages 663-669

  Jakobs, Stefan ^a   Schallenberg, Uwe B ^a  

^a Mso Jena Mikroschichtoptik GmbH   (Germany)

Author keywords

Filter; Microcomponents; Miniature spectrometers; Optical coatings; Photolithography

Indexed keywords

CHARGE COUPLED DEVICES; DIFFRACTION; OPTICAL COATINGS; OPTICAL DESIGN; OPTICAL MICROSCOPY; PHOTOLITHOGRAPHY; SCANNING ELECTRON MICROSCOPY; THERMAL EFFECTS; WAVE FILTERS;

MICROCOMPONENTS; MINIATURE SPECTROMETERS;

SPECTROMETERS;

EID: 1942425449     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.516918     Document Type: Conference Paper

References (5)

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