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Volumn 188, Issue 1, 2001, Pages 263-266
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Uniformity and Scalability of AlGaN/GaN HEMTs Using Stepper Lithography
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 1942425025
PISSN: 00318965
EISSN: None
Source Type: Journal
DOI: 10.1002/1521-396X(200111)188:1<263::AID-PSSA263>3.0.CO;2-P Document Type: Article |
Times cited : (4)
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References (5)
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