Non-overlapping super self-aligned BiCMOS with 87 ps low power ECL

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 1988, Pages 752-755

  Chiu, Tzu Yin ^a   Chin, Gen M ^a   Lau, Maureen Y ^a   Hanson, Ronald C ^a   Morris, Mark D ^a   Lee, Kwing F ^a   Voshchenkov, Alexander M ^a   Swartz, Robert G ^a   Archer, Vance D ^a   Liu, Mark T Y ^a   Finegan, Sean N ^a   Feuer, Mark D ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED CIRCUITS, VLSI; LOGIC CIRCUITS, EMITTER COUPLED; SEMICONDUCTOR DEVICES, MOS; TRANSISTORS, BIPOLAR;

EPI/ISOLATION PROCESS; NOVA BICMOS STRUCTURE; SELF-ALIGNED BICMOS TECHNOLOGY; VLSI BICMOS TECHNOLOGY;

INTEGRATED CIRCUITS, DIGITAL;

EID: 19244372785     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)