The carbon incorporation in PECVD a-Si1-xCx:H in the low power density regime

Brazilian Journal of Physics

Volumn 27, Issue 4, 1997, Pages 150-153

  Pereyra, I ^a   Carreno M N P ^a   Prado, R J ^a   Tabacniks, M H ^a   Fantini, M C A ^a  

^a UNIVERSITY OF SÃO PAULO   (Brazil)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 19044396348     PISSN: 01039733     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (10)

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