Silicon micromachined gyro driving by angular rate of the rotating substrate

Yadian Yu Shengguang/Piezoelectrics and Acoustooptics

Volumn 27, Issue 2, 2005, Pages 109-117

  Zhang, Fu Xue ^a   Wang, Hong Wei ^a   Zhang, Wei ^a   Mao, Xu ^a   Zhang, Nan ^a  

^a BEIJING INSTITUTE OF SYSTEM ENGINEERING   (China)

Author keywords

Angular rate; Gyro; Micro mechanic; Rotating substrate

Indexed keywords

EID: 19044389175     PISSN: 10042474     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (8)